Diaphragm Gas Compressor

A diaphragm compressor uses a flexible metal membrane to compress gas. The gas never contacts the piston or crankcase oil. This design handles toxic, flammable, and high-purity gases without contamination or leakage.

✓ Metal Diaphragm✓ Zero Leakage✓ Toxic Gas Safe✓ Up to 1000 Bar

Quick Specifications

Gas TypesH₂, He, O₂, N₂, Ar, SF₆, and more

Inlet Pressure0–50 Bar

Discharge PressureUp to 1000 Bar

Flow Rate5–500 Nm³/h

Diaphragm MaterialStainless Steel / Inconel

Leakage Rate< 1×10⁻⁶ mbar·L/s

Request Quote Call: +86 155 8905 3798

Factory Direct Price Global Shipping Quality Guaranteed 24/7 Support

Why Choose This Product

Hermetic Gas Containment

The gas path is welded shut except for inlet and outlet ports. There are no dynamic shaft seals where gas can escape.

Diaphragm Rupture Detection

A sensor monitors the hydraulic oil for gas breakthrough. If the diaphragm cracks, the machine stops automatically before gas contaminates the oil system.

Corrosion-Resistant Wetted Parts

All gas-contacting surfaces can be supplied in 316L stainless, Inconel, Hastelloy, or Monel depending on the gas chemistry.

How It Works

The diaphragm compressor separates the gas from the mechanical drive using a thin metal disc. Hydraulic oil on one side flexes the diaphragm, and the gas on the other side gets compressed. The gas touches only the diaphragm and the gas head — both made of corrosion-resistant alloys.

This makes it suitable for gases that cannot tolerate any oil contamination (semiconductor process gases), that are hazardous if they leak (hydrogen, chlorine), or that are expensive (helium, xenon).

Maximum discharge pressure can reach 1000 bar in multi-stage configurations. Flow rates are lower than screw or piston compressors — this machine is used where purity and containment matter more than volume.

Full Specifications

Parameter	Specification
Gas Compatibility	H₂, He, O₂, N₂, Ar, CO₂, SF₆, Cl₂, NH₃, rare gases
Inlet Pressure	Atmospheric to 50 Bar
Discharge Pressure	10–1000 Bar (model dependent)
Flow Rate	5–500 Nm³/h
Stages	1 / 2 / 3 (depending on pressure ratio)
Diaphragm	316L Stainless Steel / Inconel 718
Gas Head	316L SS / Hastelloy / Monel
Leakage	< 1×10⁻⁶ mbar·L/s (hermetic)
Drive	Electric Motor with Crankshaft
Cooling	Water Cooled
Certification	CE, PED, ATEX (optional)

Industry Applications

Hydrogen Fueling

Semiconductor Fabs

Specialty Chemicals

Medical Gases

Need Help Choosing?

Tell us your air demand, pressure requirement, and application. Our engineers will recommend the right model and provide a quotation.